Alloying of metals and metal compounds in diamond CVD facilities

The addition of Titanium or Vanadium during the CVD diamond coating process is expected to enable new electrical states in diamond crystal structures. The effect of alloying on the mechanical properties is also being investigated.

Current research topics:

• Evaporators for organometallic compounds with Titanium or Vanadium.
• Combination of sputtering processes with hot-filament diamond CVD.

• Glaser A., Rosiwal S., Singer R.:
  Chemical vapor infiltration (CVI) - Part II: Infiltration of porous substrates with diamond by using a new designed hot-filament plant
  In: Diamond and Related Materials 15 (2006), p. 49-54
  ISSN: 0925-9635
  DOI: 10.1016/j.diamond.2005.07.010